Stroboscopic Imaging Interferometer for MEMS Performance Measurement 15 July 2007
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منابع مشابه
Optical Measurement Methods to Study Dynamic Behavior in MEMS
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In this paper a method for digitally recording four quarter-reference-wave-holograms (by CCD) in a Mach-Zehnder interferometer setup, and reconstructing the object wave-front by numerical method is presented. The terms of direct transmission, auto-correlation and conjugate wave in the four wave reconstruction are cancelled out and only one original object wave is left after overlapping. Reconst...
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تاریخ انتشار 2007